Instrument/ServiceType:
Reactive Ion Etcher
Make/ Model:
AXIC PlasmaSTAR
Instrument Description:
Used for dry etching and ashing.
Keywords for the Instrument:
Plasma Cleaning, Etching, Ashing
Instrument Website URL:
Primary Contact Name:
David Alchenberger
Email: alchenbd@jila.colorado.edu
Phone 303.492.2389
Home Department/Institute:
JILA
Home Facility:
JILA Keck Lab
Instrument Location:
JILA X121D
Instrument Availability to Campus Users:
Open on a case-by-case basis to the university users outside of the home department
Instrument Availability to External Academic and National Lab Users:
Open on a case-by-case basis to academic and national lab users