Instrument/ServiceType:

Reactive Ion Etcher & Inductively Coupled Plasma Etcher

Make/ Model:

PlasmaTherm 540/790 & STS LPX-ICP

Instrument Description:

For anisotropic & high aspect ratio deep etch

Instrument Website URL:聽

Primary Contact:

Tzu-Min Ou 聽 聽 聽聽

Email: cnl@colorado.edu

Instrument Location:

Engineering Center, room ECEE271